The ceramic arm plays a handling role in semiconductor equipment. It is equivalent to the hand of a robot in semiconductor equipment, and is responsible for transporting silicon wafers to designated positions. Because silicon wafers are extremely susceptible to contamination by other particles, they are generally carried out in a vacuum environment. In this environment, it is generally difficult for the robotic arm of most materials to complete the work, and the materials used to make the robotic arm need to be resistant to high temperatures, wear-resistant, and have high hardness. Silicon carbide material is a good choice.

There are two general ceramic manipulators, one is alumina ceramic manipulator, and the other is silicon carbide ceramic manipulator.

Both alumina ceramics and silicon carbide ceramics have the physical properties of compactness, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation and good corrosion resistance in high temperature environments And other physical properties, it is an excellent material for making semiconductor equipment robotic arms.

But in terms of performance, a robotic arm made of silicon carbide ceramics is better than a robotic arm made of alumina ceramics.

Atmospheric pressure sintered silicon carbide ceramic products are made of high-purity ultra-fine silicon carbide micro-powder and sintered at 2450℃. The silicon carbide content is above 99.1%, the product density is ≥3.10g/cm3, and does not contain metal impurities such as metal silicon.