In the field of semiconductor manufacturing, the aluminum nitride heater is a key component in semiconductor thin-film deposition and other equipment, playing an important role in the production of integrated circuits and other semiconductor devices. During the manufacturing process, semiconductor wafers need to undergo various processes such as film deposition and etching. These processes require the wafers to be processed at specific temperatures, with extremely strict requirements for temperature uniformity. This is because the uniformity of wafer temperature directly affects the quality of semiconductor chips. Additionally, these processes often need to be carried out in special environments such as vacuum, plasma, or chemical gases, making the aluminum nitride heater an ideal solution.
The aluminum nitride heater is a core component in semiconductor thin-film deposition equipment. It can achieve uniform temperature distribution and heat the wafers evenly, ensuring high-precision chemical reactions on the substrate surface to produce high-quality films. Its structure typically includes an aluminum nitride ceramic base and a cylindrical support. The surface of the ceramic base is used for placing wafers, while the backside is supported by the support structure. Inside or on the surface of the ceramic base, there are not only heating resistive circuits for heating but also conductive components such as RF electrodes and electrodes for electrostatic chucks.
The main material of the aluminum nitride heater is aluminum nitride ceramic. Aluminum nitride has excellent electrical insulation and thermal conductivity, making it outstanding in applications that require efficient heat dissipation. More importantly, the thermal expansion coefficient of aluminum nitride is very close to that of silicon, and it has excellent plasma resistance. These properties make it an ideal material for manufacturing components of semiconductor processing equipment.
In summary, the aluminum nitride heater, with its unique performance and structure, plays a crucial role in semiconductor manufacturing processes and provides solid technological support for the development of the semiconductor industry.
