The materials used to make the robot arm need to be resistant to high temperatures, wear-resistant, and have high hardness. At this time, some people found that fine ceramic materials can meet these conditions. There are two general ceramic robot arms, one is an alumina ceramic robot arm, and the other is a silicon carbide ceramic robot arm.

Alumina ceramics and silicon carbide ceramics have the physical properties of dense quality, high hardness, strong wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation, and good corrosion resistance. They are excellent materials for making semiconductor equipment robot arms.

However, in terms of performance, the robot arm made of silicon ceramics is better than the robot arm made of alumina ceramics.

Ordinary sintered silicon carbide ceramic products are made of high-purity ultrafine silicon carbide powder, sintered at 2450℃, with a silicon carbide content of more than 99.1%, and a product density of ≥3.10g/cm3.