The pore size of microporous ceramics of traditional vacuum chuck is greater than 10μm. When the adsorption size is smaller than the disc surface, the vacuum will leak from the non-contact area and local adsorption cannot be achieved. The local adsorption vacuum chuck uses 1μm-level pore size microporous ceramics with low gas permeability. When the adsorption size is smaller than the disc surface, the speed of vacuum leakage in the non-contact area is much lower than the speed of vacuum pump creating vacuum, so the product in the contact area can be firmly adsorbed.
