Alumina Arm
Ceramic robotic arms made of alumina ceramics are used in the handling of silicon wafers. Both alumina ceramics and silicon carbide ceramics have the physical properties of density, high hardness, high wear resistance, good heat resistance, excellent mechanical strength, good insulation and corrosion resistance in high temperature environments, and are excellent materials for making semiconductor equipment robotic arms. From the perspective of material properties, silicon carbide ceramics are more suitable for making ceramic robotic arms, but from the perspective of economic aspects such as material price and processing difficulty, alumina ceramic robotic arms are more cost-effective.
