Application scenarios:
Etching DPS and thin film CVD parts

Process difficulties:
(1) Raw material molding and sintering of large-sized irregular cavity ceramic parts
(2) Electrical property control (dielectric constant, dielectric loss)

Solution:
(1) Use one-time isostatic pressing and raw material processing process, and use a special sintering method for sintering:
(2) Use high-purity raw materials and control the amount of impurities introduced during the process;