Silicon Carbide Arm
Ceramic robotic arms made of silicon carbide ceramics are used in the handling of wafer silicon chips. Both alumina ceramics and silicon carbide ceramics have the physical properties of density, high hardness, high wear resistance, good heat resistance, excellent mechanical strength, good insulation and good corrosion resistance in high temperature environments, and are excellent materials for making semiconductor equipment robotic arms. From the perspective of material properties, silicon carbide ceramics are more suitable for making ceramic robotic arms, but from the economic aspects of material price, processing difficulty, etc., alumina ceramic robotic arms are more cost-effective.
